The recently published National Institute of Standards and Technology (NIST) CHIPS Research and Development Office roadmap highlights metrology as foundational for all semiconductor research and development programs, and indicates that it will be closely integrated across CHIPS R&D activities. Northern Arizona University is well-positioned to help address national metrology needs given our faculty expertise in this area. With the support of NAU administration, the Arizona Board of Regents, the Arizona Commerce Authority, and the Office of the Arizona Governor, NAU established this Metrology Research and Teaching Laboratory (MRTL) at the Engineering Research Center (Building 98E). This Laboratory serves as a hub connecting various NAU departments and academic programs, organizing research teams, hosting workshops and seminars, consolidating metrology research facilities, coordinating R&D focused on semiconductor metrology, and partnering with industry as well as the other two public universities (ASU and U of A). The Metrology Research and Teaching Laboratory (MRTL) bolsters NAU's leadership in microelectronics research and support national R&D priorities.
We propose launching a Microelectronics Metrology Certificate program which will provide critical workforce training and help meet semiconductor labor demands. Additionally, we propose establishing an interdisciplinary, campus-wide Microelectronics Metrology Center focused on metrology research and development for semiconductor manufacturing.
To develop talent and workforce supporting the CHIPS Act mission, MRTL offers an undergraduate Microelectronics Metrology Certificate program, providing students with the knowledge and skills they need to succeed in the semiconductor metrology field.
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Discover our diverse range of courses under the Education menu. Each course is designed with specific student objectives for effective learning. Embark on your educational journey with us and achieve your academic goals.
Popular Courses
This course focuses on building students' skills in microelectronics metrology, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making.
Dr.Andy Wang
This course provides an overview of the fundamental physics governing the electrical, optical, and thermal properties of semiconductor devices.
This course is intended for graduate students in electrical engineering, materials science, and physics programs. Prerequisites include courses in semiconductor physics and electrical measurements at the undergraduate level.
Dr. Carlo daCunha
This graduate-level course provides an in-depth overview of spectroscopic techniques used to probe the electronic, vibrational, rotational, and magnetic structure of atoms, molecules, and solids. Theoretical foundations of atomic and molecular spectroscopy are developed, including treatment of absorption, emission, scattering of electromagnetic radiation.
Prerequisites: Quantum mechanics, electricity and magnetism.
Dr. Miguel Yacaman
This course covers the principles, techniques, and instruments used in quantitative chemical analysis. Topics include statistical data analysis, gravimetry, titrimetry, spectroscopy, chromatography, mass spectrometry, electroanalytical chemistry, and thermal analysis.
Prerequisites: CHM 114, CHM 115. Lab component.
TBD
This advanced undergraduate analytical chemistry course focuses on the theory and application of modern instrumental methods of chemical analysis. Topics covered include atomic and molecular spectroscopy, mass spectrometry, electroanalytical techniques, chromatography, thermal methods, and surface analysis.
Prerequisites: CHM 310, CHM 315.
TBD
This course provides a comprehensive overview of theoretical and practical aspects of electron microscopy for the life sciences. Topics include basic principles of electron optics, image formation, modes of operation, sample preparation methods, and applications of scanning electron microscopy (SEM) and transmission electron microscopy (TEM).
TBD
