The recently published National Institute of Standards and Technology (NIST) CHIPS Research and Development Office roadmap highlights metrology as foundational for all semiconductor research and development programs, and indicates that it will be closely integrated across CHIPS R&D activities. Northern Arizona University is well-positioned to help address national metrology needs given our faculty expertise in this area. With the support of NAU administration, the Arizona Board of Regents, the Arizona Commerce Authority, and the Office of the Arizona Governor, NAU established this Metrology Research and Teaching Laboratory (MRTL) at the Engineering Research Center (Building 98E). This Laboratory serves as a hub connecting various NAU departments and academic programs, organizing research teams, hosting workshops and seminars, consolidating metrology research facilities, coordinating R&D focused on semiconductor metrology, and partnering with industry as well as the other two public universities (ASU and U of A). The Metrology Research and Teaching Laboratory (MRTL) bolsters NAU's leadership in microelectronics research and support national R&D priorities.
We propose launching a Microelectronics Metrology Certificate program which will provide critical workforce training and help meet semiconductor labor demands. Additionally, we propose establishing an interdisciplinary, campus-wide Microelectronics Metrology Center focused on metrology research and development for semiconductor manufacturing.
To develop talent and workforce supporting the CHIPS Act mission, MRTL offers an undergraduate Microelectronics Metrology Certificate program, providing students with the knowledge and skills they need to succeed in the semiconductor metrology field.
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Popular Courses
This course covers metrology, emphasizing precise measurement and its importance across industries, including measurement systems, calibration, and error analysis. Students will gain hands-on experience with industry-standard equipment to apply metrology principles in real-world scenarios.
The FE (Fundamentals of Engineering) exam is the first step in the process of becoming a licensed professional engineer (PE).
It is a computer-based exam administered year-round at NCEES-approved Pearson VUE test centers.
This course introduces Statistical Process Control (SPC) for monitoring manufacturing processes, covering variability, control charts, and process capability analysis. Students will apply SPC techniques through practical examples to reduce variations and enhance quality and efficiency.
This course introduces the semiconductor industry, focusing on materials, their role in electronics, and fabrication techniques. Students will explore the manufacturing process and its economic impact, gaining practical knowledge for careers or advanced studies in the field.
COURSE SELECTION
This course focuses on building students' skills in microelectronics metrology, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making.
Dr.Andy Wang
This course provides an overview of the fundamental physics governing the electrical, optical, and thermal properties of semiconductor devices.
This course is intended for graduate students in electrical engineering, materials science, and physics programs. Prerequisites include courses in semiconductor physics and electrical measurements at the undergraduate level.
Dr. Carlo daCunha
This graduate-level course provides an in-depth overview of spectroscopic techniques used to probe the electronic, vibrational, rotational, and magnetic structure of atoms, molecules, and solids. Theoretical foundations of atomic and molecular spectroscopy are developed, including treatment of absorption, emission, scattering of electromagnetic radiation.
Prerequisites: Quantum mechanics, electricity and magnetism.
Dr. Miguel Yacaman
